Precision motion control
High-Performance Linear Slides for Precision Motion and Automation
PI offers motorized linear slides, XY stages, piezo motor stages, voice-coil stages, nanopositioning slides, and motion controllers for scientific, industrial, and OEM automation applications.
Linear Slide Options
Motorized SlidesCompact servo and stepper-motor slides for precise positioning in automation and laboratory systems.
Piezo Motor StagesFast, compact, self-locking motion with high resolution and optional vacuum-compatible designs.
Voice Coil StagesFrictionless direct-drive motion for high-speed scanning, focusing, and dynamic positioning.
Nanopositioning SlidesPiezo flexure stages for sub-nanometer resolution and fast response in precision applications.
Product Selection
- Travel 25 mm
- 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
- Min. Incremental Motion to 0.2 µm
- Max. Velocity 20 mm/s
- Cross-Roll Bearings
- Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
- 0.05 µm Minimum Incremental Motion
- 5, 15 and 25 mm Travel
- Velocity to 1.5 mm/sec.
- Closed-Loop DC Motors and Stepper Motors
- Integrated Hall-Effect Limit and Reference Switches
- 5 to 25 mm Travel
- 5000 h MTBF
- Very Cost Effective
- 200 Nanometer Minimum Incremental Motion
- Hall-Effect Limit & Reference Switches
- Recirculating Ball Screw for Extended Lifetime
- Cost-Effective, High-Precision Linear Slides
- Piezo Motor Miniature Slides
- Travel 6.5mm to 32mm
- Velocity to 10mm/sec
- Self-Locking
PILine ® Miniature Linear Slides with Ultrasonic Piezo Linear Motors
- Smallest Linear Slide with High-Speed Linear Motor Drive
- 20 mm Travel
- Velocity to 500 mm/s
- Acceleration to 20 g
- Position Resolution to 50 Nanometer
- Self-Locking
- XY-Combinations Available
- 20000 h MTBF
U-521 PILine® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors
- Small Linear Slides with Closed-Loop Linear Motors and Linear Encoder
- 20 mm Travel
- Velocity up to 500 mm/s
- Accelerations up to 20 g
- Position Resolution to 0.1 µm
- Integrated Direct-Metrology Linear Encoder
- AutoLock Feature
- XY Combinations Available
Miniature Linear Slides with Closed-Loop Piezo Motors
- Travel 13mm, 23mm, 31mm
- Nanometer Resolution
- Ultra-Compact
- Direct Motion Metrology Linear Encoder with Nanometer Resolution
- Compact XY and XYZ Combinations
- Piezo Inertia Linear Motor
- Self Locking at Rest
Low-Profile Linear Slides with Direct Drive Linear Motors, up to 100mm Travel
- 40 to 100mm Travel
- Low-Profile
- Velocity to 1000mm/s
- Acceleration to 20 g
- 5nm Resolution Encoder (Direct-Motion Metrology)
- XY and XYZ Combinations Available
XY Slides for Microscope Autoamtion
- Integrated Closed-Loop Piezo Linear Motors Provide High Speed to 100 mm/s
- >100mm Travel
- Integrated Linear Encoders with 0.01 µm Resolution
- Low Profile Height,
- Large Clear Aperture 78x78 mm, 66x66 mm in Extreme Position
- Self-Locking at Rest
- Compatible with PI Piezo Nano-Positioning & Nano-Scanning stages
M-126 Compact Linear Translation Slides with Crossed Roller Bearings
- To 25 mm Travel
- Manual, DC-Servo and Stepper-Motor Drives
- ActiveDriveâ„¢ Option
- Compatible with Leading Industrial Motion Controllers
- Crossed Roller Bearings
- <0.1 µm Position Resolution
- XY and XYZ Combinations
- Direction-Sensing Origin Switch
- Cost-Effective Design
- Preloaded Leadscrews or Recirculating Ball Screws
- Travel from 25 to 300 mm
- Stress-Relieved Aluminum Base 80 and 120 mm Width
- Minimum Incremental Motion to 0.1 µm
- Position Resolution to 0.017 µm
Linear Stage Configurator with 1000's of Variations
- Travel Ranges to 300 mm
- Stress-Relieved Aluminum Stage Base for Highest Stability
- Precision Bearings
- DC-Servo and Stepper-Motor Drives
- Compatible with Leading Industrial Motion Controllers
- Non-Contact Direction-Sensing Origin Switch
- Non-Contact Limit Switches
M-605 Ultra-Compact, High-Accuracy Linear Slide
- Integrated Linear-Scale Encoders for Highest Accuracy
- Travel Ranges 25 mm (1") and 50 mm (2")
- Velocity up to 50 mm/sec.
- Active Drive Motors
- Compatible with Leading Industrial Motion Controllers
- Stress-Relieved Aluminum Stage Base for Highest Stability
- Zero-Backlash Recirculating Ball Screws
- Non-Contact, Direction-Sensing Origin Switch
M-505 Low-Profile Linear Slides with Ball Screw Drives
- Travel Ranges to 150 mm (6 inches)
- Velocity up to 50 mm/sec.
- ActiveDrive Motors
- Compatible with Leading Industrial Motion Controllers
- Stress-Relieved Aluminum Stage Base for Highest Stability
- Zero-Backlash Recirculating Ball Screws
- Non-Contact Direction-Sensing Origin Switch
- Non-Contact Limit Switches
M-511 M-521 M-531 Low-Profile, High-Load Linear Slides with Ball Screw Drives
- Travel Ranges to 306 mm (12")
- Velocity up to 125 mm/sec.
- ActiveDrive Motors
- Compatible with Leading Industrial Motion Controllers
- Linear-Scale Encoders for Highest Accuracy
- Stress-Relieved Aluminum Stage Base for Highest Stability
- Zero-Backlash Recirculating Ball Screws
- Non-Contacting Origin and Limit Switches
- Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
- 4 Nanometer Linear Encoder Position Resolution
- 100 mm Travel
- Velocities to 125 mm/sec
- Active Compensation of Stick/Slip During Startup and Settling
- Active Backlash Compensation
- Excellent Velocity Control
- Millisecond Settling to Nanometer Accuracy
- Fast Scanning and Positioning
- Scanning Frequency 10s of Hz
- Travel Ranges of 5, 10, 20mm
- Velocity up to 250mm/sec
- 10 Nanometer Linear Encoder Resolution
- Available PCI-Card Controller with On-Board Amplifiers
- Z-Axis Travel to 400 µm
- Low Profile
- Position Resolution <1 Nanometer
- Frictionless Precision Flexure Guiding System
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
- Direct Motion Metrology with Capaciance Feedback for Improved Linearity
- 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Travel 12.5 mm (1/2")
- Ultra-High-Resolution Encoder
- ActiveDriveâ„¢ Motor
- Compatible with Leading Industrial Motion Controllers
- Stress-Relieved Aluminum Stage Base for Highest Stability
- Zero-Backlash Recirculating Ball Screws
- Non-Contact Origin and Limit Switches
- >20,000 Hours MTBF
High-Load Vertical Micropositioning Stage
- 3 Nanometer Design Resolution
- 12 kg Load Capacity, High Stiffness
- <100 Nanometer Minimum Incremental Motion
- 12.5 mm (1/2") Travel
- ActiveDriveâ„¢ Motor
- Compatible with Leading Industrial Motion Controllers
- Non-Contact Origin and Limit Switches
- Mounting Platform for P-500 and PIMarsâ„¢ Piezo- Nanopositioning Systems
- Different Drive Types and Counter-Balance Options
- Linear Encoder
- High Holding Forces with Minimum Power Consumption
- Excellent Velocity Control
- Fast Settling
- Reliable Execution of Minimal Increments
P-780 Miniature Piezo Nanopositioning/Scanning Slide with Direct Metrology
- Fast Response (1 kHz Resonant Frequency)
- Stainless Steel Construction
- Frictionless Precision Flexure Guiding System
- 80 µm Travel
- Direct Motion Metrology with LVDT Sensor
- Position Resolution <5 Nanometer
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
P-750 High-Load Piezo-Driven Nanopositioning Slides with Direct Metrology
- 10 kg Load Capacity
- 1 Nanometer Lateral Guiding Precision
- Position Resolution <1 Nanometer
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
- Fast Response
- 75 µm Travel
- Direct Motion Metrology with Capaciance Feedback for Improved Linearity
- Frictionless Precision Flexure Guiding System
P-620.1 P-628.1 PIHera ® Miniature Long-Range Piezo Nanopositioning Slides with Direct Motion Metrology
- Travel to 1800 µm
- Compact Design
- Position Resolution <1 Nanometer
- Frictionless Precision Flexure Guiding System
- Ceramic Encapsulated High-Performance Piezo Drives
- Direct Motion Metrology with Capaciance Feedback for Improved Linearity
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
P-772OL Ultra-Compact Open-Loop PZT Nanopositioning Stage
- Small Flexure-Guided Linear Slide
- 50 Picometer Resolution
- 10 µm Travel
- Ultra-Fast Response (1.7 kHz Resonant Frequency)
- Closed-Loop Version Available
P-772 Ultra-Compact Piezo NanoAutomation ® Slide with Direct Motion Metrology
- Smallest Flexure-Guided Linear Slide with Capacitive Feedback
- Ideal for Head/Media Test & Fiber Optics
- Position Resolution <0.1 nm
- Ultra-Fast Response (1.7 kHz Resonant Frequency)
- ID-Chip for Auto Calibrate Function
- Frictionless Precision Flexure Guiding System
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
P-752 Piezo NanoAutomation ® Slides with Direct Motion Metrology
- Extreme Responsivness
- Ultra-Precise Trajectory Control
- Digital Controllers with Fast FiberLink Interface Available
- ID-Chip for AutoCalibrate Function
- Direct-Metrology Capaciance Feedback for Improved Linearity
- 0.1 Nanometers Resolution
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
P-753 LISA Piezo NanoAutomation Slides / Actuators with Direct Motion Metrology
- Slide and Linear Actuator in one Package
- Frictionless Precision Flexure Guiding System
- 0.05 Nanometers Position Resolution
- Direct Motion Metrology with Capaciance Feedback for Improved Linearity
- Extreme Responsivness, Very Compact
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
- ID-Chip for Auto Calibrate Function
- Vacuum Versions Available
P-287 Z/Tilt Piezoelectric Flexure Stage
- Frictionless Precision Flexure Guiding System
- Vertical Travel to 700 µm
- Tilt to 0.7 degrees
- Non-Magnetic Stainless Steel Design
P-290 Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator
- Vertical Travel to 1000 µm
- Integrated Double-Flexure Motion Amplifier
- Non-Magnetic Stainless Steel Design
P-601 PiezoMove ® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
- Flexure Guidance for Frictionless, Ultra-Straight Motion
- Travel Ranges to 480 µm
- Position Resolution to 0.2 Nanometer
- High Dynamics and Stiffness
- Ceramic Encapsulated High-Performance Piezo Actuators
- Open and Closed-Loop Versions
- Ideal for OEM Applications
P-783 Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology
- Z-Axis Travel to 300 µm
- Low Profile
- Frictionless Precision Flexure Guiding System
- Internal Motion Amplifier
- Closed-Loop Position Resolution <10 Nanometer
- PICMA High-Performance Multilayer Piezo Drives
- High Stiffness for High-Dynamics Operation
- Up to 250 Microns Vertical Travel
- <1 Nanometer Resolution
- Excellent Straightness of travel
- Clear Aperture Option
P-612 Compact Piezo Elevation Stage with Aperture
- Small Footprint: 60x60 mm
- For Cost-Sensitive Applications
- 100 µm Travel
- Position Resolution to 0.2 Nanometer
- Clear Aperture : 20x20 mm
- PICMA High-Performance Multilayer Piezo Actuators
P-541.ZSL Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy
- Lower Profile for Easy Integration: 16.5 mm
- Z and Tip/Tilt Versions
- Fast Response
- 100 µm Linear Travel
- 80x80 mm Clear Aperture
- Ceramic Encapsulated High-Performance Multilayer Piezo Actuators for Superior Lifetime
- Combination with Long Travel Microscopy Stages
P-541.ZCD Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy with Parallel Direct Motion Metrology
- Lower Profile for Easy Integration: 16.5 mm
- Z and Tip/Tilt Versions
- Choice of Strain Gauge (Lower Cost) or Capaciance Feedback (Higher Performance)
- 100 µm Linear Travel , 1 milliradian Tilt
- 80x80 mm Clear Aperture
- Ceramic Encapsulated High-Performance Multilayer Piezo Actuators for Superior Lifetime
- Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging
P-528 Z/Tip/Tilt Piezo Flexure Guided Nanopositioning / Scanning Slides with Parallel Direct Motion Metrology
- Precision Trajectory Control
- Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Travel Ranges to 200 µm / 4 milliradian
- Clear Aperture 66x66 mm
- Direct Motion Metrology with Capaciance Feedback for Improved Linearity
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
- Scans and Positions Objectives with Sub-Nanometer Resolution
- Low Inertia for Fast Settling
- Frictionless Precision Flexure Guiding System
- Travel to 100 µm
- Straightness of Travel ≤13 microradian
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
- Scans and Positions Objectives with Sub-Nanometer Resolution
- High Linearity and Stability with Direct-Measuring Sensors
- Travel to 100 µm, fast Settling Time
- Very Straight Motion for Enhanced Focus Stability
- Ask about DIC Prism Holder Option
- Compatible with Metamorph TM Imaging Software
- Quick Lock Adapter for Easy Attachment
P-725 PIFOC Long-Range, High-Speed Nanofocusing Z-Drives with Direct Motion Metrology
- Scans and Positions Objectives with Sub-Nanometer Resolution
- High Linearity and Stability with Direct-Measuring Capaciance Feedback
- Travel to 460 µm, Fast Response & Settling Time
- Frictionless Precision Flexure Guiding System
- Enhanced Guiding Precision for Better Focus Stability
- Ask about DIC Prism Holder Option
- Controller Compatible with Metamorph TM Imaging Software
- Quick Lock Adapter for Easy Attachment
P-280 Modular Piezo Flexure Guided Nanopositioning Stages
- Frictionless Precision Flexure Guiding System
- Very Compact
- Low Cost
- Travel to 100 µm
- XY and XYZ Combinations
P-611.ZS P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems
- Small Footprint: 44x44 mm
- 100 µm Travel
- Position Resolution to 0.2 Nanometer
- For Cost-Sensitive Applications
- Ceramic Encapsulated High-Performance Multilayer Piezo Actuators
- Open- and Closed-Loop Models
P-611.1 P-611.2 Compact X & XY Piezoelectric Nanopositioning Systems
- Small Footprint: 44x44 mm
- 100 µm Travel
- Position Resolution to 0.2 Nanometer
- For Cost-Sensitive Applications
- Ceramic Encapsulated High-Performance Multilayer Piezo Actuators
- Z-Stage also Available
P-281 Modular XY & XYZ Piezo Flexure Guided Nanopositioning Stages
- Cost-Effective XZ (XY) & XYZ Positioning
- Travel Ranges to 100x100x100 µm
P-620.2 P-628.2 PIHera ® Long-Range XY Piezo Nanopositioning Slides with Direct Motion Metrology
- XY-Travel to 1800 µm
- Compact Design
- Position Resolution <1 Nanometer
- Frictionless Precision Flexure Guiding System
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
- Direct Motion Metrology with Capaciance Feedback for Improved Linearity
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
P-363 PicoCube ® High-Speed, XY(Z) Piezo Slides for Nanotechnology, SPM, AFM
- Ultra-High-Performance Closed-Loop Piezo Stage for AFM/SPM
- NanoManipulation Tool
- Ultra-High-Precision Capacitive Feedback
- 50 Picometers Resolution
- 5x5x5 µm Travel
- Very Small Package
- Rugged Design
>P-611.3S P-611.3O NanoCube ® Piezo System XYZ Linear Slide
- Travel : 100x100x100 µm
- Compact Size: 44x44x44 mm
- 1 Nanometer Resolution
- Ideal for Fiber-Alignment and Photonics Packaging Applications
- Optional E-760 Controller Card Features Built-In Optical Metrology
- Closed- and Open-Loop Versions
- Flexure-Guided Precision Trajectory Control
- Fast Scanning and Settling
P-587 Six-Axis, Long-Travel Piezo Nano-Positioning & Nano-Scanning Stage with Parallel Direct Motion Metrology
- For Scanning and Positioning in all Six Degrees of Freedom
- 800x800x200 µm Linear Range
- Up to 10 mad Rotational Range
- Precision Trajectory Control
- Parallel-Kinematic / Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Direct Motion Metrology with Capaciance Feedback for Improved Linearity
- ID-Chip for Auto Calibration Function
- Ceramic Encapsulated High-Performance Multilayer Piezo Drives
