High Performance Linear Slides: Motorized Slides for Precision Motion & Automation
PI makes the highest precision performnace linear slides for micro & nanopositioning. In addition to classical motorized linear slides, PI also provides a vast selection of piezoelectric flexure slides for ultra precision motion control applications, and linear motor positioning slides for scientific and industrial applications.
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Hexapod 6-Axis Stage Brochure
Experience / Custom Systems
Linear Slides
Travel 25 mm
0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
Min. Incremental Motion to 0.2 µm
Max. Velocity 20 mm/s
Cross-Roll Bearings
Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
PDF
0.05 Micro Meters Minimum Incremental Motion
5, 15 and 25 mm Travel s
Velocity to 1.5 mm/sec.
Closed - Loop DC Motors and Stepper Motors
Integrated Hall - Effect Limit and Reference
Switches
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| PDF
5 to 25 mm Travel s
5000 h MTBF
Very Cost Effective
200 Nanometer Minimum Inc. Motion
Hall - Effect Limit & Reference Switches
Recirculating Ballscrew for Extended
Lifetime
Product Description | | | PDF
Cost-Effective, High-Precision Linear Slides
Piezo Motor Miniature Slides
Travel 6.5mm to 32mm
Velocity to 10mm/sec
Self-Locking
PDF
M-661 - M-662 PILine®
Miniature Linear Slides with Ultrasonic
Piezo Linear Motors
Smallest Linear Slide with High-Speed
Linear Motor Drive
20 mm Travel
Velocity to 500 mm/s
Acceleration to 20 g
Position Resolution to 50 Nanometer
Self-Locking
XY-Combinations Available
20000 h MTBF
Vacuum Versions to 10-7
hPa
PDF
M-663 PILine® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors
Small Linear Slides with Closed-Loop Linear Motors and Linear Encoder
20 mm Travel
Velocity up to 500 mm/s
Accelerations up to 20 g
Position Resolution to 0.1 Micro Meters
Integrated Direct-Metrology Linear Encoder
AutoLock Feature
XY Combinations Available
20,000 h MTBF
Vacuum Versions Available
PDF
M-664 PILine®
Miniature Linear Slides with Closed-Loop
Ultrasonic Piezo Linear Motors
Travel 25 mm
Max. Velocity 400 mm/s
Ultra-Low Profile, 15 mm
Direct Motion Metrology Linear Encoder with 0.1 µm Resolution
High Guiding Accuracy with Crossed Roller Bearings
Compact XY Combinations
Piezo Linear Motor with 6 N Drive Force
Self Locking at Rest
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PDF
M-665
PILine® Low-Profile Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors
50 mm Travel
Low-Profile, only 26.5 mm
Velocity to 400 mm/s
Acceleration to 20 g
0.1 Micro Meters Linear Encoder (Direct-Motion Metrology)
AutoLock Feature
XY Combinations Available
20,000 h MTBF
Vacuum Versions to 10-8 hPa Available
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PDF
M-682 Compact Closed-Loop Performnace Linear Slide with High-Force Piezo Linear Motor
Integration of the Powerful PILine® RodDrive
Low Profile, Compact Dimensions
Max. Velocity 350 mm/s
Up to 7 N Pushing Force
Direct Motion Metrology Linear Encoder, 0.1 µm Resolution
Non-Magnetic and Vacuum-Compatible Versions Available
PDF
M-686 Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders
Integrated Closed-Loop Piezo Linear Motors Provide High Speed to 100 mm/s
25x25 mm Travel s
Integrated Linear Encoders with 0.1 µm Resolution
Compact Design; 27 mm Profile Height, 150x150 mm Footprint
Large Clear Aperture 78x78 mm, 66x66 mm in Extreme Position
Self-Locking at Rest
Compatible with PI Piezo Nano-Positioning & Nano-Scanning stages
PDF
M-126 Compact Linear Translation Slides
with Crossed Roller Bearings
To 25 mm Travel
Manual, DC-Servo and Stepper-Motor Drives
ActiveDrive Option
Compatible with Leading Industrial Motion Controllers
Crossed Roller Bearings
<0.1 Micro Meters Position Resolution
XY and XYZ Combinations
Direction-Sensing Origin Switch
Non-Contact Limit Switches
PDF
Cost-Effective Design
Modular System with 4 Series: M-403, M-404, M-413, M-414
Preloaded Leadscrews or Recirculating Ball Screws
Travel s from 25 to 300 mm
Stress-Relieved Aluminum Base 80 and 120 mm Width
Minimum Incremental Motion to 0.1 Micro Meters
Position Resolution to 0.017 Micro Meters
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Product Description | | | PDF
M-400 Series High-Precision
Linear Slides with Crossed Roller
Bearings
Travel Ranges to 150 mm
Stress-Relieved Aluminum Stage Base for
Highest Stability
Crossed Roller Bearings
Manual, DC-Servo and Stepper-Motor Drives,
ActiveDrive™ Option
Compatible with Leading Industrial Motion
Controllers
Manual Knob for Convenient Position
Adjustment
Non-Contact Direction-Sensing Origin Switch
Non-Contact Limit Switches
PDF
M-605 Ultra-Compact,
High-Accuracy Linear Slide
Integrated Linear-Scale Encoders for Highest
Accuracy
Travel Ranges 25 mm (1") and 50 mm (2")
Velocity up to 50 mm/sec.
Active Drive™ Motors
Compatible with Leading Industrial Motion
Controllers
Stress-Relieved Aluminum Stage Base for
Highest Stability
Zero-Backlash Recirculating Ballscrews
Non-Contact, Direction-Sensing Origin Switch
Non-Contact Limit Switches
Load Capacity 20 kg
>20,000 Hours MTBF
PDF
M-505 Low-Profile
Linear Slides with Ballscrew
Drives
Travel Ranges to 150 mm (6 inches)
Velocity up to 50 mm/sec.
ActiveDrive™ Motors
Compatible with Leading Industrial Motion
Controllers
Stress-Relieved Aluminum Stage Base for
Highest Stability
Zero-Backlash Recirculating Ballscrews
Non-Contact Direction-Sensing Origin Switch
Non-Contact Limit Switches
Load Capacity 100 kg
> 20,000 Hours MTBF
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PDF
M-511 · M-521 · M-531 Low-Profile,
High-Load Linear Slides with Ballscrew
Drives
Travel Ranges to 306 mm (12")
Velocity up to 125 mm/sec.
ActiveDrive™ Motors
Compatible with Leading Industrial Motion
Controllers
Linear-Scale Encoders for Highest Accuracy
Stress-Relieved Aluminum Stage Base for
Highest Stability
Zero-Backlash Recirculating Ballscrews
Non-Contacting Origin and Limit Switches
PIIntelliStage™ Version with Integrated
Controller
Load Capacity 100 kg
>20000 Hours MTBF
PDF
Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
4 Nanometer Linear Encoder Position Resolution
100 mm Travel
Velocities to 125 mm/sec
Active Compensation of Stick/Slip During Startup and Settling
Active Backlash Compensation
Excellent Velocity Control
Millisecond Settling to Nanometer Accuracy
Reliable Execution of Minimal Increments
High Drive and Holding Forces with Minimal Power
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PDF
Voice Coil Scanning Slide
Fast Scanning and Positioning
Scanning Frequency 10s of Hz
Travel Ranges of 5, 10, 20mm
Velocity up to 250mm/sec
10 Nanometer Linear Encoder Resolution
Available PCI-Card Controller with On-Board
Amplifiers
Voice Coil Slide Data Sheet | PDF | Vertical Linear Slide Scanner
Vertical Translation Stages
Z-Axis Travel to 400 Micro Meters
Low Profile
Position Resolution <1 Nanometer
Frictionless Precision Flexure Guiding
System
Ceramic Encapsulated High-Performance Multilayer Piezo
Drives
Direct Motion Metrology with Capaciance Feedback for
Improved Linearity
0.02% Position Accuracy
X, XY, Z, XYZ Versions
Vacuum-Compatible
Versions
Product Description | | | PDF
Travel 12.5 mm (1/2")
Ultra-High-Resolution Encoder
ActiveDrive Motor
Compatible with Leading Industrial Motion
Controllers
Stress-Relieved Aluminum Stage Base for
Highest Stability
Zero-Backlash Recirculating Ballscrews
Non-Contact Origin and Limit Switches
>20,000 Hours
MTBF
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Product Description | | | PDF
M-451 High-Load
Vertical Micropositioning Stage
3 Nanometer Design Resolution
12 kg Load Capacity, High Stiffness
<100 Nanometer Minimum Incremental Motion
12.5 mm (1/2") Travel
ActiveDrive Motor
Compatible with Leading Industrial Motion
Controllers
Non-Contact Origin and Limit Switches
Mounting Platform for P-500 and PIMars
Piezo- Nanopositioning Systems
Self Locking
PDF
Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
2 Nanometer Linear Encoder Position Resolution
High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
Active Compensation of Stick/Slip During Startup and Settling
Active Backlash Compensation
Excellent Velocity Control
Millisecond Settling to Nanometer Accuracy
Reliable Execution of Minimal Increments
PDF
Single Axis Piezo Nanopositioning Slides
P-780 Miniature
Piezo Nanopositioning/Scanning Slide with Direct
Metrology
Fast Response (1 kHz Resonant Frequency)
Stainless Steel Construction
Frictionless Precision Flexure Guiding
System
80 Micro Meters Travel
Direct Motion Metrology with LVDT Sensor
Position Resolution <5 Nanometer
Ceramic Encapsulated High-Performance Multilayer Piezo
Drives
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P-750 High-Load
Piezo-Driven Nanopositioning Slides with Direct
Metrology
10 kg Load Capacity
1 Nanometer Lateral Guiding Precision
Position Resolution <1 Nanometer
Ceramic Encapsulated High-Performance Multilayer Piezo
Drives
Fast Response
75 Micro Meters Travel
Direct Motion Metrology with Capaciance Feedback for
Improved Linearity
Frictionless Precision Flexure Guiding
System
P-620.1 – P-628.1
PIHera®
Miniature Long-Range Piezo Nanopositioning
Slides with Direct Motion Metrology
Travel to 1800 Micro Meters
Compact Design
Position Resolution <1 Nanometer
Frictionless Precision Flexure Guiding
System
Ceramic Encapsulated High-Performance Piezo Drives
Direct Motion Metrology with Capaciance Feedback for
Improved Linearity
Up to 0.02% Position Accuracy
X, XY, Z, XYZ Versions
Vacuum-Compatible Versions
P-772OL Ultra-Compact Open-Loop PZT Nanopositioning Stage
Small Flexure-Guided Linear Slide
50 Picometer Resolution
10 Micro Meters Travel
Ultra-Fast Response (1.7 kHz Resonant Frequency)
Closed-Loop Version Available
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P-772 Ultra-Compact Piezo NanoAutomation® Slide with Direct Motion Metrology
Smallest Flexure-Guided Linear Slide with Capacitive Feedback
Ideal for Head/Media Test & Fiber Optics
Position Resolution <0.1 nm
Ultra-Fast Response (1.7 kHz Resonant Frequency)
ID-Chip for Auto Calibrate Function
Frictionless Precision Flexure Guiding System
Ceramic Encapsulated High-Performance Multilayer Piezo Drives
P-752 Piezo NanoAutomation® Slides with Direct Motion Metrology
Extreme Responsivness
Ultra-Precise Trajectory Control
Digital Controllers with Fast FiberLink Interface Available
ID-Chip for AutoCalibrate Function
Direct-Metrology Capaciance Feedback for Improved Linearity
0.1 Nanometers Resolution
Ceramic Encapsulated High-Performance Multilayer Piezo Drives
P-753 LISA Piezo NanoAutomation® Slides / Actuators with Direct Motion Metrology
Slide and Linear Actuator in one Package
Frictionless Precision Flexure Guiding System
0.05 Nanometers Position Resolution
Direct Motion Metrology with Capaciance Feedback for Improved Linearity
Extreme Responsivness, Very Compact
Ceramic Encapsulated High-Performance Multilayer Piezo Drives
ID-Chip for Auto Calibrate Function
Vacuum Versions Available
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Z-Stage & Actuators
P-287 Z/Tilt
Piezoelectric Flexure Stage
Frictionless Precision Flexure Guiding
System
Vertical Travel to 700 Micro Meters
Tilt to 0.7 degrees
Non-Magnetic Stainless Steel
Design
P-290 Long-Travel
Piezoelectric Z-Nanopositioning Flexure Stage /
Actuator
Vertical Travel to 1000 Micro Meters
Integrated Double-Flexure Motion Amplifier
Non-Magnetic Stainless Steel
Design
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P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
Flexure Guidance for Frictionless, Ultra-Straight Motion
Travel Ranges to 480 Micro Meters
Position Resolution to 0.2 Nanometer
High Dynamics and Stiffness
Ceramic Encapsulated High-Performance Piezo Actuators
Open and Closed-Loop Versions
Ideal for OEM Applications
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P-783 Piezoelectric
Z-Nanopositioning Stage / Actuator with Direct
Metrology
Z-Axis Travel to 300 Micro Meters
Low Profile
Frictionless Precision Flexure Guiding
System
Internal Motion Amplifier
Closed-Loop Position Resolution <10 Nanometer
PICMA® High-Performance Multilayer Piezo
Drives
P-620.Z · P-621.Z · P-622.Z PIHera®
Piezo-Z Nanopositioning Slides with
Direct Motion Metrology
Z-Axis Travel to 400 Micro Meters
Low Profile
Position Resolution <1 Nanometer
Frictionless Precision Flexure Guiding
System
Ceramic Encapsulated High-Performance Multilayer Piezo
Drives
Direct Motion Metrology with Capaciance Feedback for
Improved Linearity
0.02% Position Accuracy
X, XY, Z, XYZ Versions
Vacuum-Compatible
Versions
Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
2 Nanometer Linear Encoder Resolution
High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
Active Compensation of Stick/Slip During Startup and Settling
Active Backlash Compensation
Excellent Velocity Control
Millisecond Settling to Nanometer Accuracy
Reliable Execution of Minimal Increments
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Z-/Tip/Tilt
Slides (with Aperture)
High Stiffness for High-Dynamics Operation
Up to 15 Micro Meters Vertical Travel
<1 Nanometer Resolution
Straightness of travel <10 microradian
Clear Aperture with 25 mm
Diameter
P-612 Compact
Piezo Elevation Stage with Aperture
Small Footprint: 60x60 mm
For Cost-Sensitive Applications
100 Micro Meters Travel
Position Resolution to 0.2 Nanometer
Clear Aperture : 20x20 mm
PICMA® High-Performance Multilayer Piezo
Actuators
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P-541.ZSL Low-Profile
Z/Tip/Tilt Piezo Nanopositioning Slides for
Microscopy
Lower Profile for Easy Integration: 16.5 mm
Z and Tip/Tilt Versions
Fast Response
100 Micro Meters Linear Travel
80x80 mm Clear Aperture
Ceramic Encapsulated High-Performance Multilayer Piezo
Actuators for Superior Lifetime
Combination with Long Travel Microscopy
Stages
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P-541.ZCD Low-Profile
Z/Tip/Tilt Piezo Nanopositioning Slides for
Microscopy with Parallel Direct Motion Metrology
Lower Profile for Easy Integration: 16.5 mm
Z and Tip/Tilt Versions
Choice of Strain Gauge (Lower Cost) or
Capaciance Feedback (Higher Performance)
100 Micro Meters Linear Travel , 1 milliradian Tilt
80x80 mm Clear Aperture
Ceramic Encapsulated High-Performance Multilayer Piezo
Actuators for Superior Lifetime
Ideal for fast Z-Stack Acquisition and 3D
Deconvolution Imaging
P-528 Z/Tip/Tilt
Piezo Flexure Guided Nanopositioning / Scanning Slides
with Parallel Direct Motion Metrology
Precision Trajectory Control
Parallel-Kinematics/Metrology for Enhanced
Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micro Meters / 4 milliradian
Clear Aperture 66x66 mm
Direct Motion Metrology with Capaciance Feedback for
Improved Linearity
Ceramic Encapsulated High-Performance Multilayer Piezo
Drives
PIFOC® Objective
Scanners
Scans and Positions Objectives with Sub-Nanometer
Resolution
Low Inertia for Fast Settling
Frictionless Precision Flexure Guiding
System
Travel to 100 Micro Meters
Straightness of Travel ≤13 microradian
Ceramic Encapsulated High-Performance Multilayer Piezo
Drives
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Scans and Positions Objectives with Sub-Nanometer
Resolution
High Linearity and Stability with
Direct-Measuring Sensors
Travel to 100 Micro Meters, fast Settling Time
Very Straight Motion for Enhanced Focus
Stability
Ask about DIC Prism Holder Option
Compatible with MetamorphTM Imaging Software
Quick Lock Adapter for Easy
Attachment
P-725 PIFOC®
Long-Range, High-Speed Nanofocusing Z-Drives
with Direct Motion Metrology
Scans and Positions Objectives with Sub-Nanometer
Resolution
High Linearity and Stability with
Direct-Measuring Capaciance Feedback
Travel to 460 Micro Meters, Fast Response &
Settling Time
Frictionless Precision Flexure Guiding
System
Enhanced Guiding Precision for Better Focus
Stability
Ask about DIC Prism Holder Option
Controller Compatible with MetamorphTM
Imaging Software
Quick Lock Adapter for Easy
Attachment
Multi-Axis Slides without Aperture
P-280 Modular
Piezo Flexure Guided Nanopositioning
Stages
Frictionless Precision Flexure Guiding
System
Very Compact
Low Cost
Travel to 100 Micro Meters
XY and XYZ
Combinations
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P-611.ZS · P-611.XZS
Compact
Z and XZ Piezoelectric Nanopositioning
Systems
Small Footprint: 44x44 mm
100 Micro Meters Travel
Position Resolution to 0.2 Nanometer
For Cost-Sensitive Applications
Ceramic Encapsulated High-Performance Multilayer Piezo
Actuators
Open- and Closed-Loop
Models
P-611.1 · P-611.2 Compact
X & XY Piezoelectric Nanopositioning
Systems
Small Footprint: 44x44 mm
100 Micro Meters Travel
Position Resolution to 0.2 Nanometer
For Cost-Sensitive Applications
Ceramic Encapsulated High-Performance Multilayer Piezo
Actuators
Z-Stage also Available
P-281 Modular
XY & XYZ Piezo Flexure Guided Nanopositioning
Stages
Cost-Effective XZ (XY) & XYZ Positioning
Travel Ranges to 100x100x100
Micro Meters
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P-620.2 – P-628.2 PIHera®
Long-Range XY Piezo Nanopositioning Slides with
Direct Motion Metrology
XY-Travel to 1800 Micro Meters
Compact Design
Position Resolution <1 Nanometer
Frictionless Precision Flexure Guiding
System
Ceramic Encapsulated High-Performance Multilayer Piezo
Drives
Direct Motion Metrology with Capaciance Feedback for
Improved Linearity
Up to 0.02% Position Accuracy
X, XY, Z, XYZ Versions
Vacuum-Compatible Versions
P-363 PicoCube®
High-Speed, XY(Z) Piezo Slides for
Nanotechnology, SPM, AFM &
Ultra-High-Performance Closed-Loop Piezo Stage
for AFM/SPM
NanoManipulation Tool
Ultra-High-Precision Capacitive Feedback
50 Picometers Resolution
5x5x5 Micro Meters Travel
Very Small Package
Rugged Design
>P-611.3S · P-611.3O
NanoCube®
Piezo System XYZ Linear Slide
Travel : 100x100x100 Micro Meters
Compact Size: 44x44x44 mm
1 Nanometer Resolution
Ideal for Fiber-Alignment and Photonics
Packaging Applications
Optional E-760 Controller Card Features
Built-In Optical Metrology
Closed- and Open-Loop Versions
Flexure-Guided Precision Trajectory Control
Fast Scanning and Settling
Large Variety of
Controllers
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P-587 Six-Axis,
Long-Travel Piezo Nano-Positioning & Nano-Scanning
Stage with Parallel Direct Motion Metrology
For Scanning and Positioning in all Six
Degrees of Freedom
800x800x200 Micro Meters Linear Range
Up to 10 mad Rotational Range
Precision Trajectory Control
Parallel-Kinematic / Metrology for
Enhanced Responsiveness / Multi-Axis Precision
Direct Motion Metrology with Capaciance Feedback for
Improved Linearity
ID-Chip for Auto Calibration Function
Ceramic Encapsulated High-Performance Multilayer Piezo
Drives
Multi-Axis Stage with Aperture