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Motorized Actuators
Miniature Linear Slides, Piezo-Motor Driven
Linear Slides: Precision Piezo & Motorized Micropositioning and Nanopositioning Systems for Motion Control

Miniature Slides w/
Servo / Stepper Motors


Miniature Slides
Lead-/Ball- Screw Drive
Travel: to 25 mm or 360°
Linear Slides w/
Servo / Stepper Motors


Travel: to 306 mm (12")
Forces to 200 N
Resolution to 50 nm
Hybrid Ultra-Precision Linear Slide

Forces to 100 kN
Sub-nm Resolution
Fast Response
Voice Coil-Driven Linear Slide

Scanning Freq:10s of Hz
Velocity to 270 mm/s
Travel: 20 mm / 6 mm
Vertical
Linear Slide

Active Servo Motor
High Speed
Travel: 1/2" (12.5 mm)

Small PiezoMotor Linear Slides

Fast: to 800 mm/sec
Acceleration to 20 g
Self-Locking, Non-
    Magnetic, Vacuum
    Compatible
XY Piezo Motor Linear Slide

0.1 µm Resolution
Travel: to 25x25 mm
Low Profile, Compact
    Dimensions
Piezo Flexure Linear Nanopositioning Slides

Sub-nm Precision
Sub-Millisecond
    Response
Fast Scanning
Linear
Actuators


Travel: 10 mm-50 mm
Forces to 600 N
Resolution to Sub-nm
Servo
Controllers


Servo/Stepper/
    Piezomotor Options
1-18 Channel Options
PC-Card, OEM /
    Rack-mount
 

PI makes the highest precision linear slides for micro & nanopositioning. In addition to classical motorized linear slides, PI also provides a vast selection of piezoelectric flexure slides for ultra precision motion control applications, and linear motor positioning slides for scientific and industrial applications.

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Hexapod 6-Axis Stage Brochure
Experience / Custom Systems


Linear Slides

Product Image - Fast Miniature Linear Slide with Integrated Optical Linear Encoder

M-122 Fast Miniature Linear Slide with Integrated Optical Linear Encoder


  • Travel 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Product Description | | | PDF
Product Image - High-Position Resolution Micro-Linear Slides

M-110 High-Resolution Micro-Linear Slides


  • 0.05 Micro Meters Minimum Incremental Motion
  • 5, 15 and 25 mm Travel s
  • Velocity to 1.5 mm/sec.
  • Closed - Loop DC Motors and Stepper Motors
  • Integrated Hall - Effect Limit and Reference Switches
Back to Top
Parametric Search      Product Description | | | PDF
Product Image - High-Position Resolution Micro-Linear Slides with Ballscrew Drive

M-110.2 - M-112.2 High-Resolution Micro-Linear Slides with Ballscrew Drive


  • 5 to 25 mm Travel s
  • 5000 h MTBF
  • Very Cost Effective
  • 200 Nanometer Minimum Inc. Motion
  • Hall - Effect Limit & Reference Switches
  • Recirculating Ballscrew for Extended Lifetime
Product Description | | | PDF
Product Image - PILine Micro Piezomotor Linear Drive

Micro Piezomotor Linear Slides


  • Cost-Effective, High-Precision Linear Slides
  • Piezo Motor Miniature Slide
  • Travel 6.5mm to 32mm
  • Velocity to 10mm/sec
  • Self-Locking
Product Description | | | PDF
Product Image - PILine Miniature Linear Slides with Ultrasonic Piezo Linear Motors

M-661 - M-662 PILine® Miniature Linear Slides with Ultrasonic Piezo Linear Motors


  • Smallest Linear Slide with High-Speed Linear Motor Drive
  • 20 mm Travel
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Position Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
Product Description | | | PDF
Product Image - PILine Miniature Linear Slides

M-663 PILine® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors


  • Smallest Linear Slide with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Position Resolution to 0.1 Micro Meters
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available
Product Description | | | PDF
Product Image -  PILine Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors

M-664 PILine® Miniature Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors


  • Travel 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Motion Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
Back to Top Product Description | | | PDF
Product Image - M-665
PILine® Low-Profile Translation Stages

M-665 PILine® Low-Profile Linear Slides with Closed-Loop Ultrasonic Piezo Linear Motors


  • 50 mm Travel
  • Low-Profile, only 26.5 mm
  • Velocity to 400 mm/s
  • Acceleration to 20 g
  • 0.1 Micro Meters Linear Encoder (Direct-Motion Metrology)
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions to 10-8 hPa Available
Back to Top
Parametric Search      Product Description | | | PDF

Product Image - PILine Low-Profile Translation Stagewith Closed-Loop Ultrasonic Piezo Linear Motors

M-682 Compact Closed-Loop Linear Slide with High-Force Piezo Linear Motor


  • Integration of the Powerful PILine® RodDrive
  • Low Profile, Compact Dimensions
  • Max. Velocity 350 mm/s
  • Up to 7 N Pushing Force
  • Direct Motion Metrology Linear Encoder, 0.1 µm Resolution
  • Non-Magnetic and Vacuum-Compatible Versions Available

Product Description | | | PDF

Product Image - Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders

M-686 Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders


  • Integrated Closed-Loop Piezo Linear Motors Provide High Speed to 100 mm/s
  • 25x25 mm Travel s
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150x150 mm Footprint
  • Large Clear Aperture 78x78 mm, 66x66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nano-Positioning & Nano-Scanning stages

Product Description | | | PDF
Product Image -  Series of Miniature Linear Slide

M-311 – M-318 Miniature Linear Slide


  • Extremely Compact
  • All-Stainless-Steel Construction
  • X, XY and XYZ Versions
  • Optional PiezoMike for Nanometer Resolution
  • 4 mm Clear Aperture
  • Linear Ball Bearings
Product Description | | | PDF
Product Image - Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-011 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Travel to 15 mm
  • Compact Side Drive
  • Straightness/Flatness ≤ 0.2 Micro Meters
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro Meters Position Resolution with Closed-Loop DC Motor
  • 5 Nanometer Position Resolution with Closed-Loop PZT Drive
Back to Top
Parametric Search      Product Description | | | PDF
Product Image - Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-014 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Travel 25 mm
  • Compact Side Drive
  • Straightness/Flatness ≤0.3 Micro Meters
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro Meters Position Resolution with Closed-Loop DC Motor
  • 5 Nanometer Position Resolution with Closed-Loop PZT Drive
  • 30 mm Ř Clear Aperture
Product Description | | | PDF
Product Image - Translation Stage with Crossed Roller Bearings

M-126 Translation Stage with Crossed Roller Bearings


  • To 25 mm Travel
  • Manual, DC-Servo and Stepper-Motor Drives
  • ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Crossed Roller Bearings
  • <0.1 Micro Meters Position Resolution
  • XY and XYZ Combinations
  • Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | | | PDF
Product Image - High-Position Resolution Translation Stage with Stepper and DC Motor Drives

M-403, M-404, M-413, M-414 High-Resolution Linear Slide with Stepper and DC Motor Drives


  • Cost-Effective Design
  • Modular System with 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Travel s from 25 to 300 mm
  • Stress-Relieved Aluminum Base 80 and 120 mm Width
  • Minimum Incremental Motion to 0.1 Micro Meters
  • Position Resolution to 0.017 Micro Meters
Back to Top
Parametric Search      Product Description | | | PDF
Product Image - High-Precision Linear Slides with Crossed Roller Bearings

M-400 Series High-Precision Linear Slides with Crossed Roller Bearings


  • Travel Ranges to 150 mm
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Crossed Roller Bearings
  • Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Manual Knob for Convenient Position Adjustment
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | | | PDF
Product Image - Ultra-Compact, High-Accuracy Translation Stages

M-605 Ultra-Compact, High-Accuracy Linear Slide


  • Integrated Linear-Scale Encoders for Highest Accuracy
  • Travel Ranges 25 mm (1") and 50 mm (2")
  • Velocity up to 50 mm/sec.
  • Active Drive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF
Product Description | | | PDF
Product Image - Low-Profile Translation Stage with Ballscrew Drives

M-505 Low-Profile Linear Slides with Ballscrew Drives


  • Travel Ranges to 150 mm (6 inches)
  • Velocity up to 50 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 100 kg
  • > 20,000 Hours MTBF
Back to Top
Parametric Search      Product Description | | | PDF
Product Image - Low-Profile, High-Load Linear Slides with Ballscrew Drives

M-511 · M-521 · M-531 Low-Profile, High-Load Linear Slides with Ballscrew Drives


  • Travel Ranges to 306 mm (12")
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF
Product Description | | | PDF
Product Image - Hybrid Scanning System

M-511.HD Long-Travel, High-Speed Nanopositioning Systems


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 4 Nanometer Linear Encoder Position Resolution
  • 100 mm Travel
  • Velocities to 125 mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power
Back to Top
Parametric Search      Product Description | | | PDF
Voice Coil Scanning Stage
Product Image - Voice-Coil Scanning System

V-106 Long-Travel, High-Dynamics Scanning System with Voice Coil Drives


  • Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Travel Ranges of 20 mm and 6 mm
  • Velocity up to 270 mm/s
  • 0.1 Micro Meters Linear Encoder
  • Available PCI-Card Controller with On-Board Amplifiers
Product Description | | | PDF


Vertical Translation Stages

Product Image - IHera Vertical Piezo Nanopositioning Slides with Direct Motion Metrology

P-620.Z · P-621.Z · P-622.Z PIHera® Piezo-Z Nanopositioning Slides with Direct Motion Metrology


  • Z-Axis Travel to 400 Micro Meters
  • Low Profile
  • Position Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Product Description | | | PDF
Product Image - Vertical Micropositioning Stage

M-501 Vertical Micropositioning Stage


  • Travel 12.5 mm (1/2")
  • Ultra-High-Resolution Encoder
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Origin and Limit Switches
  • >20,000 Hours MTBF

Back to Top
Parametric Search      Product Description | | | PDF
Product Image -  High-Load Vertical Micropositioning Stage

M-451 High-Load Vertical Micropositioning Stage


  • 3 Nanometer Design Resolution
  • 12 kg Load Capacity, High Stiffness
  • <100 Nanometer Minimum Incremental Motion
  • 12.5 mm (1/2") Travel
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Non-Contact Origin and Limit Switches
  • Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
  • Self Locking

Product Description | | | PDF
Product Image -  M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage

M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Position Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments


Product Description | | | PDF


   Single Axis Piezo Nanopositioning Slides

Product Image - Miniature Piezo Nanopositioning/Scanning Slide with Direct Motion Metrology

P-780 Miniature Piezo Nanopositioning/Scanning Slide with Direct Metrology


  • Fast Response (1 kHz Resonant Frequency)
  • Stainless Steel Construction
  • Frictionless Precision Flexure Guiding System
  • 80 Micro Meters Travel
  • Direct Motion Metrology with LVDT Sensor
  • Position Resolution <5 Nanometer
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives


Back to Top
Product Image - High-Load Piezo-Driven Nanopositioning Slides with Direct Motion Metrology

P-750 High-Load Piezo-Driven Nanopositioning Slides with Direct Metrology


  • 10 kg Load Capacity
  • 1 Nanometer Lateral Guiding Precision
  • Position Resolution <1 Nanometer
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • Fast Response
  • 75 Micro Meters Travel
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Frictionless Precision Flexure Guiding System

Product Image - PIHera Miniature Long-Range Piezo Nanopositioning Slides with Direct Motion Metrology

P-620.1 – P-628.1 PIHera® Miniature Long-Range Piezo Nanopositioning Slides with Direct Motion Metrology


  • Travel to 1800 Micro Meters
  • Compact Design
  • Position Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Piezo Drives
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions

Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-772OL Ultra-Compact Open-Loop PZT Nanopositioning Stage


  • Small Flexure-Guided Linear Slide
  • 50 Picometer Resolution
  • 10 Micro Meters Travel
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • Closed-Loop Version Available

Back to Top
Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-772 Ultra-Compact Piezo NanoAutomation® Slide with Direct Motion Metrology


  • Smallest Flexure-Guided Linear Slide with Capacitive Feedback
  • Ideal for Head/Media Test & Fiber Optics
  • Position Resolution <0.1 nm
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • ID-Chip for Auto Calibrate Function
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives

Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-752 Piezo NanoAutomation® Slides with Direct Motion Metrology


  • Extreme Responsivness
  • Ultra-Precise Trajectory Control
  • Digital Controllers with Fast FiberLink Interface Available
  • ID-Chip for AutoCalibrate Function
  • Direct-Metrology Capaciance Feedback for Improved Linearity
  • 0.1 Nanometers Resolution
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives

Product Image - Ultra-Compact Open-Loop PZT Nanopositioning Stage

P-753 LISA Piezo NanoAutomation® Slides / Actuators with Direct Motion Metrology


  • Slide and Linear Actuator in one Package
  • Frictionless Precision Flexure Guiding System
  • 0.05 Nanometers Position Resolution
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Extreme Responsivness, Very Compact
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available

Back to Top
   Z-Stage & Actuators

Product Image - Z/Tilt Piezoelectric Flexure Stage

P-287 Z/Tilt Piezoelectric Flexure Stage


  • Frictionless Precision Flexure Guiding System
  • Vertical Travel to 700 Micro Meters
  • Tilt to 0.7 degrees
  • Non-Magnetic Stainless Steel Design



Product Image - Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator

P-290 Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator


  • Vertical Travel to 1000 Micro Meters
  • Integrated Double-Flexure Motion Amplifier
  • Non-Magnetic Stainless Steel Design


Back to Top
Product Image - PiezoMove High-Precision Lever Amplified Z-Actuator with Flexure Guiding

P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding


  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Micro Meters
  • Position Resolution to 0.2 Nanometer
  • High Dynamics and Stiffness
  • Ceramic Encapsulated High-Performance Piezo Actuators
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications


Back to Top
Product Image - Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Motion Metrology

P-783 Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology


  • Z-Axis Travel to 300 Micro Meters
  • Low Profile
  • Frictionless Precision Flexure Guiding System
  • Internal Motion Amplifier
  • Closed-Loop Position Resolution <10 Nanometer
  • PICMA®High-Performance Multilayer Piezo Drives


Product Image - IHera Vertical Piezo Nanopositioning Slides with Direct Motion Metrology

P-620.Z · P-621.Z · P-622.Z PIHera® Piezo-Z Nanopositioning Slides with Direct Motion Metrology


  • Z-Axis Travel to 400 Micro Meters
  • Low Profile
  • Position Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions

Product Image - M-714 Hybrid Piezo Z-Stage

M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments

Back to Top

    Z-/Tip/Tilt Slides (with Aperture)

Product Image - Nanopositioning Stage With Aperture

P-732 High-Dynamics Vertical Nanopositioning/Scanning Stage


  • High Stiffness for High-Dynamics Operation
  • Up to 15 Micro Meters Vertical Travel
  • <1 Nanometer Resolution
  • Straightness of travel <10 microradian
  • Clear Aperture with 25 mm Diameter



Product Image - Compact Piezo Elevation Stage with Aperture

P-612 Compact Piezo Elevation Stage with Aperture


  • Small Footprint: 60x60 mm
  • For Cost-Sensitive Applications
  • 100 Micro Meters Travel
  • Position Resolution to 0.2 Nanometer
  • Clear Aperture : 20x20 mm
  • PICMA® High-Performance Multilayer Piezo Actuators

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Product Image - Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy

P-541.ZSL Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy


  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Fast Response
  • 100 Micro Meters Linear Travel
  • 80x80 mm Clear Aperture
  • Ceramic Encapsulated High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Combination with Long Travel Microscopy Stages

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Product Image - Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy with Parallel Direct Motion Metrology

P-541.ZCD Low-Profile Z/Tip/Tilt Piezo Nanopositioning Slides for Microscopy with Parallel Direct Motion Metrology


  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Choice of Strain Gauge (Lower Cost) or Capaciance Feedback (Higher Performance)
  • 100 Micro Meters Linear Travel , 1 milliradian Tilt
  • 80x80 mm Clear Aperture
  • Ceramic Encapsulated High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging

Product Image - Z/Tip/Tilt Piezo Flexure Guided Nanopositioning / Scanning Slides with Parallel Direct Motion Metrology

P-528 Z/Tip/Tilt Piezo Flexure Guided Nanopositioning / Scanning Slides with Parallel Direct Motion Metrology


  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 Micro Meters / 4 milliradian
  • Clear Aperture 66x66 mm
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives

     PIFOC® Objective Scanners

Product Image - PIFOC High-Speed Microscope Objective Nanofocusing/Scanning Z-Drives

P-720 PIFOC® High-Speed Microscope Objective Nanofocusing/Scanning Z-Drives


  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • Low Inertia for Fast Settling
  • Frictionless Precision Flexure Guiding System
  • Travel to 100 Micro Meters
  • Straightness of Travel ≤13 microradian
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives


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Product Image - PIFOC High-Speed Nanofocusing/Scanning Z-Drives with Direct Motion Metrology

P-721 PIFOC® High-Speed Nanofocusing/Scanning Z-Drives with Direct Motion Metrology


  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Sensors
  • Travel to 100 Micro Meters, fast Settling Time
  • Very Straight Motion for Enhanced Focus Stability
  • Ask about DIC Prism Holder Option
  • Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment


Product Image - IFOC Long-Range, High-Speed Nanofocusing Z-Drives with Direct Motion Metrology

P-725 PIFOC® Long-Range, High-Speed Nanofocusing Z-Drives with Direct Motion Metrology


  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Capaciance Feedback
  • Travel to 460 Micro Meters, Fast Response & Settling Time
  • Frictionless Precision Flexure Guiding System
  • Enhanced Guiding Precision for Better Focus Stability
  • Ask about DIC Prism Holder Option
  • Controller Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment



    Multi-Axis Slides without Aperture

Product Image - Modular Piezo Flexure Guided Nanopositioning Slides

P-280 Modular Piezo Flexure Guided Nanopositioning Stages


  • Frictionless Precision Flexure Guiding System
  • Very Compact
  • Low Cost
  • Travel to 100 Micro Meters
  • XY and XYZ Combinations


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Product Image - Compact Z and XZ Piezoelectric Nanopositioning Systems

P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems


  • Small Footprint: 44x44 mm
  • 100 Micro Meters Travel
  • Position Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • Ceramic Encapsulated High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models

Product Image - Compact X &  XY Piezoelectric Nanopositioning Systems

P-611.1 · P-611.2 Compact X & XY Piezoelectric Nanopositioning Systems


  • Small Footprint: 44x44 mm
  • 100 Micro Meters Travel
  • Position Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • Ceramic Encapsulated High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available

Product Image - Modular XY and XYZ Piezo Flexure Guided Nanopositioning Slides

P-281 Modular XY & XYZ Piezo Flexure Guided Nanopositioning Stages


  • Cost-Effective XZ (XY) & XYZ Positioning
  • Travel Ranges to 100x100x100 Micro Meters

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Product Image - PIHera Long-Range XY Piezo Nanopositioning Slides with Direct Motion Metrology

P-620.2 – P-628.2 PIHera® Long-Range XY Piezo Nanopositioning Slides with Direct Motion Metrology


  • XY-Travel to 1800 Micro Meters
  • Compact Design
  • Position Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions

Product Image - PicoCube High-Speed, XY(Z) Piezo Slides for Nanotechnology, SPM, AFM

P-363 PicoCube® High-Speed, XY(Z) Piezo Slides for Nanotechnology, SPM, AFM

&
  • Ultra-High-Performance Closed-Loop Piezo Stage for AFM/SPM
  • NanoManipulation Tool
  • Ultra-High-Precision Capacitive Feedback
  • 50 Picometers Resolution
  • 5x5x5 Micro Meters Travel
  • Very Small Package
  • Rugged Design


Product Image - NanoCube XYZ Piezo Nanopositioning Systems

P-611.3S · P-611.3O NanoCube® Piezo System XYZ Linear Slide


  • Travel : 100x100x100 Micro Meters
  • Compact Size: 44x44x44 mm
  • 1 Nanometer Resolution
  • Ideal for Fiber-Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card Features Built-In Optical Metrology
  • Closed- and Open-Loop Versions
  • Flexure-Guided Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers

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Product Image - Six-Axis, Long-Travel Piezo Nano-Positioning & Nano-Scanning Stage with Parallel Direct Motion Metrology

P-587 Six-Axis, Long-Travel Piezo Nano-Positioning & Nano-Scanning Stage with Parallel Direct Motion Metrology


  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800x800x200 Micro Meters Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel-Kinematic / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Motion Metrology with Capaciance Feedback for Improved Linearity
  • ID-Chip for Auto Calibration Function
  • Ceramic Encapsulated High-Performance Multilayer Piezo Drives



    Multi-Axis Stage with Aperture

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